Combined XRR-GIXRF analysis at LNHB: technical and analytical developments
Résumé
The XRR (“X-Ray Reflectivity”) and GIXRF (“Grazing Incidence X-Ray Fluorescence”) techniques make it possible to characterize the properties at the interfaces and in depth of materials deposited in very thin layers (thickness, roughness, composition, densities), CASTOR is a goniometer dedicated to these techniques. At LNE-LNHB we are developing the combined XRR-GIXRF analysis in a reference-free mode using calibrated instrumentation (SDD, photodiodes) and a user-friendly software dedicated to the complete analysis.