Highly selective optical filtering technology on 300 mm glass wafer for advanced spectroscopy applications
Abstract
This paper presents the fabrication and measurements of optical rejection filters, made of dielectric nanogratings developed on 300 mm glass wafer using CMOS process. Their suitability for integrated VIS-NIR spectroscopy applications is assessed.
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2022 CLEO abstract .pdf (429.21 Ko)
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2022 CLEO poster.pdf (3.04 Mo)
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| Origin | Files produced by the author(s) |
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| Origin | Files produced by the author(s) |
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