Fine characterization and Modeling of the Frequency Dependence of TDDB in RF domain (F>10GHz)
Abstract
An innovative and reliable RF setup based on sine wave stress is proposed, revealing for the first time that TDDB follows a kind of power law with frequency up to 15 GHz. A physical model based on dielectric relaxation is then proposed to explain the increase in TDDB with frequency. Finally, by using an effective duty factor for RF, AC and RF sine waves can be matched to derive a universal TDDB frequency behavior that is independent of the signal waveform.