600 µdps / √Hz, 1.2 mm2 MEMS pitch gyroscope - CEA - Commissariat à l’énergie atomique et aux énergies alternatives
Conference Papers Year : 2021

600 µdps / √Hz, 1.2 mm2 MEMS pitch gyroscope

Abstract

The paper presents a miniaturized pitch/roll gyroscope with the lowest angle random walk (ARW of 600 μdps/√Hz) and lowest bias instability (BI of 2.8 dph) ever recorded on planar MEMS sensors for in-plane rate capture. The device is based on NEMS resistive sensing, features a 1.2 mm2 footprint, a 100-Hz bandwidth, and can be combined to yaw gyroscopes for ultra-low-noise 3-axis systems. The key advancement over previous implementations is represented by a 10-fold increase in the scale factor, obtained through a novel architecture which, combined with quadrature compensation, optimizes at the same time the energy transfer to the NEMS gauges and the robustness to vibrations.
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Dates and versions

cea-04827132 , version 1 (09-12-2024)

Identifiers

Cite

M. Gadola, M. Sansa Perna, M. Allieri, P. Robert, T. Verdot, et al.. 600 µdps / √Hz, 1.2 mm2 MEMS pitch gyroscope. INERTIAL 2021 - IEEE International Symposium on Inertial Sensors and Systems, Mar 2021, Kailua-Kona, France. pp.1-4, ⟨10.1109/INERTIAL51137.2021.9430486⟩. ⟨cea-04827132⟩
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