This special section of IEEE Transactions on Semiconductor Manufacturing presents extended versions of papers originally presented as part of the IEEE 33 rd International Conference on Microelectronic Test Structures (ICMTS) which was hosted at the University of Edinburgh, Scotland. Originally planned to take place at the University’s South Hall Complex in April 2020, the impact of the global pandemic led to the difficult decision to move to a fully virtual conference held between 4 th – 18 th May 2020. The guest editors for this special section, who were honoured to act as the General Chair and Technical Chair of the conference, would like to thank all of those involved in making the virtual conference a success, not least the digital events team from the IEEE who made it possible.