Communication Dans Un Congrès Année : 2024

Enhanced 2D beam scanning: optical-phase-array on piezo-cantilever

Résumé

This work reports the development of an enhanced 2D beam scanning by combining 200 mm silicon (Si) photonics and 200 mm Si MEMS technologies. It demonstrates the fusion of an active photonic beam-steering circuit within a piezoelectrically actuated microcantilever. Operating at a wavelength of 905nm, the optical phased array (OPA) enables beam scanning up to 17° in one dimension. Simul-taneously, the circuit's inclination, in a second dimension, can be independently adjusted over a range of up to 40° via the piezoelectric actuator. This paper will focus on the technological process that combines photonics and piezoelectric materials, as well as the possibility of tailoring the cantile-ver resonance frequencies via the dimensional parameters, to suit various target applications.
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Dates et versions

cea-04799486 , version 1 (23-11-2024)

Identifiants

  • HAL Id : cea-04799486 , version 1

Citer

Laurent Mollard, Daivid Fowler, Sylvain Guerber, Christel Dieppedale, Antoine Hamelin, et al.. Enhanced 2D beam scanning: optical-phase-array on piezo-cantilever. OMN 2024 - International conference on optical mems and nanophotonics, Jul 2024, San Sebastian, Spain. ⟨cea-04799486⟩
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