Crystallization Speed in Ge-Rich PCM Cells as a Function of Process and Programming Conditions
Abstract
Quenching-time characterization is the way to measure the speed of chalcogenide material to transform from the amorphous (RESET) state to the crystalline (SET) one after application of a proper programming pulse. It is here proposed to study the impact of process and programming conditions on cell performances, highlighting possible composition variation, and modifications of the physical dimension of the PCM active volume (the dome).