Conference Papers Year : 2019

Improving the stability of 1.5 mm 2 gyroscopes down to 2°/hr at 1000 s with NEMS based sensing

Abstract

This research explores the stability performance of amplitude-modulated MEMS gyroscopes based on resistive NEMS sensing for drive and sense motion detection. After careful considerations on the device and electronic design, in particular oriented to (i) terms that affect scale-factor stability and (ii) terms that affect offset stability, a system is developed using best-in-class electronic components for temperature drift. Within a maximum voltage of 5 V (without any voltage boosting), the system shows a full-scale range larger than 350 dps on a 100-Hz bandwidth, 1 mdps/vflz angle random walk and 2°/hr bias stability up to 1000 s observation interval. All these figures are obtained on a 1.5 mm 2 footprint sensor.
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Dates and versions

cea-04792935 , version 1 (20-11-2024)

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Cite

Marco Gadola, Marco Malvicini, Giacomo Langfelder, Mikael Colin, Philippe Robert. Improving the stability of 1.5 mm 2 gyroscopes down to 2°/hr at 1000 s with NEMS based sensing. 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Apr 2019, Naples, United States. pp.1-4, ⟨10.1109/ISISS.2019.8739450⟩. ⟨cea-04792935⟩
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