A large-area curved pyroelectric fingerprint sensor
Jf. Mainguet
(1)
,
D. Gallaire
(1)
,
A. Martinent
(1)
,
A. Revaux
(1)
,
M. Benwadih
(1)
,
S. Charlot
(1)
,
A. van Breemen
(2)
,
J.- van der Steen
(2)
,
H. Akkerman
(2)
,
A. Kronemeijer
(2)
,
G. Gelinck
(2)
,
M. Pouet
(3)
,
J.-Y. Fourre
(3)
,
S. Sinopoli
,
U. Emanuele
(4)
,
L. Fritsch
(5)
,
J. Liu Jimenez
(6)
,
J. Karlsson
(7)
,
F. de Roose
(8)
,
S. Steudel
(8)
1
LITEN -
Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux
2 TNO - The Netherlands Organisation for Applied Scientific Research
3 Idemia
4 IFIC - Instituto de Fisica Corpuscular
5 IRLYNX
6 UC3M - Universidad Carlos III de Madrid [Madrid]
7 Autoliv Research
8 IMEC - IMEC
2 TNO - The Netherlands Organisation for Applied Scientific Research
3 Idemia
4 IFIC - Instituto de Fisica Corpuscular
5 IRLYNX
6 UC3M - Universidad Carlos III de Madrid [Madrid]
7 Autoliv Research
8 IMEC - IMEC
Abstract
We show a thin, flexible and large 500 dpi fingerprint sensor for security applications providing better usability than existing sensors with a similar performance. A new process flow, using PVDF-TrFE pyroelectric capacitors on top of an IGZO TFT backplane on a flexible polyimide (PI) foil is implemented to create an active thermal fingerprint sensor. The system measurements fit well with the simulation of the thermal operation.