An industrially compatible process for the fabrication of superconducting monocrystalline Si films - CEA - Commissariat à l’énergie atomique et aux énergies alternatives
Communication Dans Un Congrès Année : 2023

An industrially compatible process for the fabrication of superconducting monocrystalline Si films

Résumé

We report an industrially compatible process for the fabrication of superconducting monocrystalline Si films (~ 30 nm thick). Increasing the boron implant energy by only one keV enables superconductivity in monocrystalline films and makes the critical temperature increase up to 390 mK. Time-Resolved-Reflectometry appears as an adequate in-line characterization to identify the most promising process conditions.
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Dates et versions

cea-04752041 , version 1 (24-10-2024)

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Paul Dumas, Mathieu Opprecht, Sébastien Kerdiles, François Lefloch, Fabrice Nemouchi. An industrially compatible process for the fabrication of superconducting monocrystalline Si films. 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM), May 2023, Dresden, Germany. pp.1-3, ⟨10.1109/IITC/MAM57687.2023.10154877⟩. ⟨cea-04752041⟩
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