Data detention insights from joint analysis on BEOL-integrated HZO-based scaled FeCAPs and 16kbit 1T-1C FeRAM arrays - CEA - Commissariat à l’énergie atomique et aux énergies alternatives Accéder directement au contenu
Communication Dans Un Congrès Année : 2024

Data detention insights from joint analysis on BEOL-integrated HZO-based scaled FeCAPs and 16kbit 1T-1C FeRAM arrays

Résumé

Extensive data retention measurements are performed on HZO-based BEOL-integrated scaled ferroelectric capacitors (FeCAPs) and 16kbit 1T-1C FeRAM arrays for the first time. At FeCAP level, Opposite State (OS) retention is strongly degraded by imprint occurring during bake with 0.2eV activation energy (EA) and affecting equally ‘0’ and ‘1’ states. At 3MV/cm – 125°C, imprint is also responsible for degraded Same State (SS) and New Same State (NSS). At FeRAM-array level, post-bake distributions are reconstructed, and SS and OS ‘0’ and ‘1’ states drifts along bake time and temperature are consistent with single device data (EA = 0.19eV). These drifts are attributed to imprint and are demonstrated to be partly recoverable through bipolar cycling.
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jeudi 24 octobre 2024
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Dates et versions

cea-04557420 , version 1 (24-04-2024)

Identifiants

  • HAL Id : cea-04557420 , version 1

Citer

Julie Laguerre, Simon Martin, Jean Coignus, Catherine Carabasse, Marc Bocquet, et al.. Data detention insights from joint analysis on BEOL-integrated HZO-based scaled FeCAPs and 16kbit 1T-1C FeRAM arrays. IRPS 2024 - 2024 IEEE International Reliability Physics Symposium, Apr 2024, Dallas, Texas, United States. ⟨cea-04557420⟩
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