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Communication Dans Un Congrès Année : 2023

Metasurface-based planar microlenses integrated on back-side illuminated CMOS pixels 1 st

Résumé

Metasurface based microlenses (or metalenses) are planar microlenses which could be an alternative to replace refractive microlenses made of resist on image sensor. This paper aims at exploring through simulation the integration of metalenses on CMOS pixel array. Theses simulations precede metalenses implementation on STMicroelectronics 2.8, 4 and 8 μm pixels with updated fabrication process involving immersion photolithography. Emphasis is given on improving metalenses performances with consideration to fabrication capacities available.
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Dates et versions

cea-04510668 , version 1 (19-03-2024)

Identifiants

  • HAL Id : cea-04510668 , version 1

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Martin Lepers, Alain Ostrovsky, Patrice Genevet, Stéphane Lanteri, Jérôme Vaillant. Metasurface-based planar microlenses integrated on back-side illuminated CMOS pixels 1 st. IISW 2023 - International Image Sensor Workshop, Internal Image Sensor Society (IISS), May 2023, Crieff, United Kingdom. ⟨cea-04510668⟩
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