Highly transparent piezoelectric PZT membranes for transducer applications - CEA - Commissariat à l’énergie atomique et aux énergies alternatives Access content directly
Journal Articles Sensors and Actuators A: Physical Year : 2022

Highly transparent piezoelectric PZT membranes for transducer applications

Abstract

Transparent PZT-based membranes were fabricated out of 200 mm silicon wafers thanks to an innovative layer transfer process. The ITO (100 nm)/PZT (1.16 μm)/ITO (150 nm)/SiO2 (8.7 μm) membrane stack shows an average transmission of about 75 % in the visible spectrum. PZT film is highly (100) oriented and measured capacitors exhibit ferroelectric, dielectric and piezoelectric properties comparable to standard non-transparent PZT with metal electrodes. Piezoelectric actuation under applied voltage was verified through both static deflection and acoustic measurements. This first proof of concept opens the way to the fabrication of transparent piezoelectric transducers such as transparent PMUT devices.
Fichier principal
Vignette du fichier
Clean Paper SAA_F_Pavageau (1).pdf (1.61 Mo) Télécharger le fichier
Origin : Files produced by the author(s)

Dates and versions

cea-03791813 , version 1 (04-10-2022)

Identifiers

  • HAL Id : cea-03791813 , version 1

Cite

Franklin Pavageau, Christel Dieppedale, Pierre Perreau, Romain Liechti, Antoine Hamelin, et al.. Highly transparent piezoelectric PZT membranes for transducer applications. Sensors and Actuators A: Physical , 2022, https://doi.org/10.1016/j.sna.2022.113866. ⟨cea-03791813⟩
33 View
227 Download

Share

Gmail Facebook X LinkedIn More