High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation
Abstract
Aluminum nitride was analyzed by high-energy photoelectron spectroscopy using monochromatic Cr K$\alpha$α (5414.8 eV) radiation. The reported data include a survey spectrum and high-resolution spectra of Al 1s, Al 2s, Al 2p, N 1s, O 1s, and C 1s core levels.
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