High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation - CEA - Commissariat à l’énergie atomique et aux énergies alternatives Access content directly
Journal Articles Surface Science Spectra Year : 2022

High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation

Abstract

Aluminum nitride was analyzed by high-energy photoelectron spectroscopy using monochromatic Cr K$\alpha$α (5414.8 eV) radiation. The reported data include a survey spectrum and high-resolution spectra of Al 1s, Al 2s, Al 2p, N 1s, O 1s, and C 1s core levels.

Keywords

Fichier principal
Vignette du fichier
SSS21-AR-XPSAES-HEX2021-00043.pdf (937.05 Ko) Télécharger le fichier
Origin : Files produced by the author(s)

Dates and versions

cea-03564241 , version 1 (10-02-2022)

Identifiers

Cite

Pierre-Marie Deleuze, Kateryna Artyushkova, Eugénie Martinez, Olivier Renault. High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation. Surface Science Spectra, 2022, 29 (1), pp.014004. ⟨10.1116/6.0001510⟩. ⟨cea-03564241⟩
24 View
40 Download

Altmetric

Share

Gmail Facebook X LinkedIn More