Patents
Year : 2020
Samuel Tardif : Connect in order to contact the contributor
https://cea.hal.science/cea-03096058
Submitted on : Monday, January 4, 2021-6:58:21 PM
Last modification on : Monday, March 13, 2023-10:58:16 AM
Dates and versions
Identifiers
- HAL Id : cea-03096058 , version 1
Cite
Vincent Reboud, Alban Gassenq, S. Tardif, Vincent Calvo, Alexei Tchelnokov. Semiconductor structure including a suspended membrane containing a central segment of structured thickness. United States, Patent n° : US10666019B2. 2020. ⟨cea-03096058⟩
38
View
0
Download