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Journal Articles Applied Physics Letters Year : 2012

Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities

Abstract

We demonstrate a diamond photonics platform with integrated suspended waveguide-cavity structures and two dimensional photonic crystal (PhC) cavities. PhC cavities with quality factors exceeding 2800 have been fabricated using a top-down approach from thin nanocrystalline diamond films. The developed technological process allows one to access these cavities in a fully planar geometry, including light injection and collection from the outside using lensed-fibers. This diamond platform opens the road to large scale fabrication of photonics devices including optical sensor chips.

Dates and versions

cea-02189558 , version 1 (19-07-2019)

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X. Checoury, D. Néel, P. Boucaud, C. Gesset, Hugues Girard, et al.. Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities. Applied Physics Letters, In press, 101 (17), pp.171115. ⟨10.1063/1.4764548⟩. ⟨cea-02189558⟩
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