First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges
Abstract
For the first time, functional in-plane deflection microphones have been fabricated, validating a new
concept based on a diaphragm moving in the plane of the substrate and inducing strain on piezoresistive Si nanogauges. Such architecture, integrating furthermore a back cavity, leads to microphones with a smaller footprint that
preserve at the same time high performance, and is therefore adapted for the achievement of miniature sensors
and their integration for medical applications or consumer electronics