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Journal Articles International Journal of Nanotechnology Year : 2008

Multiply-charged ion nanobeams


Due to the strong evolution in the field of nanotechnologies and the continuous miniaturisation of electronic components, multiply-charged ion nanobeams would be a promising tool in this field of research. Either for surface modification or local (nanometer scale) surface analysis purposes, studying the feasibility of such beams is of strong interest. In the present contribution, we present a focusing technique based on the self-organised charge-up of a simple glass ‘funnel'.
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Dates and versions

cea-00273895 , version 1 (16-04-2008)


  • HAL Id : cea-00273895 , version 1


Amine Cassimi, Tomoko Muranaka, Laurent Maunoury, Henning Lebius, Bruno Manil, et al.. Multiply-charged ion nanobeams. International Journal of Nanotechnology, 2008, 5 (6/7/8), pp.809-817. ⟨cea-00273895⟩
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