Communication Dans Un Congrès Année : 2024

Hybrid SiN– Al(Ga)N Optical Phase Shifter at 1550 nm

Amélie Dussaigne

Résumé

A phase shifter based on GaN/AlxGa1-xN superlattice is experimentally evaluated, achieving a phase-shift efficiency of 7.2V·cm at 1550 nm. The phase-shifter relies on a SiN-rich rib waveguide with a 13% overlap with an underlying vertical GaN/AlxGa1-xN p-i-n junction. Additionally, we engage in a discussion about the role of charge depletion and Pockels effect on the measured phase-shift.
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Dates et versions

cea-04756487 , version 1 (28-10-2024)

Identifiants

Citer

Cyrille Barrera, Yohan Désières, Amélie Dussaigne, Eva Kempf, Ludovic Dupré, et al.. Hybrid SiN– Al(Ga)N Optical Phase Shifter at 1550 nm. 25th European Conference on Integrated Optics. ECIO 2024, Jun 2024, Aachen, Germany. pp.270-275, ⟨10.1007/978-3-031-63378-2_45⟩. ⟨cea-04756487⟩
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