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Conference Poster Year : 2022

Development of Love wave resonators for biological sensing


The development of an acoustic wave device for biological detection poses several challenges, notably, the operation in water- based complex media that reduces the performance of such devices due to acoustic wave radiation and viscous losses. Good performance in liquid media is however indispensable for biological applications1. The present work focuses on the development of a micro-electro-mechanical system (MEMS) based on Love wave resonators fabricated on a LiNbO3 substrate and a waveguide SiO2 layer. The SiO2 layer on top of the substrate also plays two other essential roles acting as an electrical insulator and offering a surface on which to graft bioreceptors. Love wave devices are commonly found in the literature with a delay-line configuration and LiTaO3/Quartz being the preferred substrates with polymers, such as Novolac, as the waveguiding layer2. We used a numerical model to first evaluate the Love wave confinement into the SiO2 layer, and second to evaluate the acoustic wave radiation when the resonator is in contact with water. PECVD (Plasma-Enhanced Chemical Vapor Deposition) and PVD (Physical Vapor Deposition) processes were used to deposit the SiO2 layer with the PECVD method showing better agreement to numerical simulations. Figure 1 shows a comparison between numerical and experimental Love wave resonators electrical response in a vacuum with a SiO2 PECVD layer. It shows good agreement in resonance frequency prediction for the Rayleigh and Bulk waves. The slight frequency shift of the Love wave is attributed to deviations in the density and stiffness of the SiO2 film deposited compared to theoretical expectations. Numerical simulations show that a relatively thick SiO2 layer is necessary to achieve high quality factors when operating in water, which is confirmed by experiments as shown in Figure 2. Other parameters such as the number of electrodes and acoustic aperture were evaluated but showed little experimental impact on the quality factors.
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cea-03846230 , version 1 (10-11-2022)


  • HAL Id : cea-03846230 , version 1


Caique Veras, Alice Joulie, Alexandre Reinhardt, Thomas Alava, Marie Bousquet, et al.. Development of Love wave resonators for biological sensing. 66th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN NO-LA 2022), May 2022, New Orleans, United States. 2022. ⟨cea-03846230⟩
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