High power 2.5D integrated thermoelectric generators combined with microchannels technology - CEA - Commissariat à l’énergie atomique et aux énergies alternatives Access content directly
Journal Articles Energy Year : 2022

High power 2.5D integrated thermoelectric generators combined with microchannels technology

Abstract

We have developed high power integrated thermoelectric generators (µTEGs). These µTEGs are CMOS compatible, i.e. based on polycristalline SiGe materials. These µTEGs have been processed directly on a silicon interposer. Even if poly-SiGe exhibits low thermoelectric performances at room temperature, the specific design and proposed architecture enable µTEGs to deliver up to 680 µW for a temperature difference at 15.5 K. To reach such high power, an original 2.5D structure has been developed and µchannels technology has been associated, below the µTEG, to dissipate heat coming from the hot side. µTEGs have been tested in real environment, located below a hot test chip. Such µTEG performances overtake those from similar state-of-the-art CMOS compatible devices, and pave the way for a potential use in different applications such as sensors power supply or battery charger.
Fichier principal
Vignette du fichier
publi µTEG_final_rev2_with no changes marked.pdf (1.81 Mo) Télécharger le fichier
Origin : Files produced by the author(s)

Dates and versions

cea-03790844 , version 1 (28-09-2022)

Identifiers

Cite

Guillaume Savelli, Jean-Philippe Colonna, Perceval Coudrain, Pascal Faucherand, Agnes Royer, et al.. High power 2.5D integrated thermoelectric generators combined with microchannels technology. Energy, 2022, 252, pp.123984. ⟨10.1016/j.energy.2022.123984⟩. ⟨cea-03790844⟩
50 View
24 Download

Altmetric

Share

Gmail Facebook X LinkedIn More