Organized AlN Nanowire Arrays by Hybrid Approach of Top-Down Processing and MOVPE Overgrowth for Deep UV Emission Devices - Laboratoire d'Electronique et des Technologies de l'Information
Journal Articles ACS Applied Nano Materials Year : 2024

Organized AlN Nanowire Arrays by Hybrid Approach of Top-Down Processing and MOVPE Overgrowth for Deep UV Emission Devices

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hal-04568259 , version 1 (09-10-2024)

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Lucie Valera, Lucas Jaloustre, Valérie Reita, Saron R.S. de Mello, Edith Bellet-Amalric, et al.. Organized AlN Nanowire Arrays by Hybrid Approach of Top-Down Processing and MOVPE Overgrowth for Deep UV Emission Devices. ACS Applied Nano Materials, 2024, 7 (9), pp.10338-10349. ⟨10.1021/acsanm.4c00814⟩. ⟨hal-04568259⟩
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