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Click on the department name to consult its publications
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GREMAN - Groupe de Recherche en Matériaux,Microélectronique, Acoustique et Nanotechnologies (UMR 7347)
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LCPR - Laboratoire de Chimie Physique et Rayonnement (UMR E4)
Latest submissions
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Paule Durin, Olha Sysova, Alexandre Téolis, Stéphane Trombotto, Samar Hajjar-Garreau, et al.. Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2023, 41 (6), pp.062204. ⟨10.1116/6.0002934⟩. ⟨hal-04266493⟩
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Nomber of fulltexts
2 753
Nomber or references
3 275
Evolution
keywords
Ab initio
Calibration
Nuclear Reactions
Static fatigue
Carbure de silicium
Defects
Endommagement
Interphase
Laser
Ytterbium
Sensor
Carbon
Dépôt chimique en phase vapeur
Comportement mécanique
Modeling
Radiation
Ceramic matrix composite
Shock waves
Silica
Fluorescence
Uncertainty quantification
Numerical simulation
Nonlinear optics
Molecular dynamics
Epos-France
Inertial confinement fusion
Plasma light propagation
Oxidation
Mechanical behavior
HPC
Laser-plasma interaction
Optical Fiber Sensor
Composite materials
Composites à matrice céramique
Durée de vie
Plasma
Ceramic matrix composites
Thermal conductivity
Lasers
Jezero crater
Microstructure
Damage
Laser-matter interaction
Fission
Ceramics
CMC
Controls
Instrumentation
Spectroscopy
Slow crack growth
LIBS
Distributed and Quasi-distributed sensing
Simulation numérique
Plasticity
Equation of state
MPI
Interaction laser-matière
Laser plasma interaction
Hydrodynamics
Boron nitride
Tantalum
Filamentation
Composite à matrice céramique
Silicon
Mars
Ionizing radiation
Characterization
Fusion par confinement inertiel
Nuclear Structure
Ultrafast lasers
SiC
DFT
High pressure
Corrosion
Mechanical properties
Tomography
Ablation
Optical fibers
Diffusion
Lifetime
Femtosecond laser
Electron
Modélisation
CVD
Sintering
Chemical vapor infiltration
CVI
Fiber Bragg Grating
Temperature
Plasma physics
Homogenization
Composite
Plasmas
Composites
Simulation
Radiation effects
Chemical vapor deposition
Nanoparticles
Oxydation
Silicon carbide