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Click on the department name to consult its publications
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GREMAN - Groupe de Recherche en Matériaux,Microélectronique, Acoustique et Nanotechnologies (UMR 7347)
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LCPR - Laboratoire de Chimie Physique et Rayonnement (UMR E4)
Latest submissions
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Paule Durin, Olha Sysova, Alexandre Téolis, Stéphane Trombotto, Samar Hajjar-Garreau, et al.. Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2023, 41 (6), pp.062204. ⟨10.1116/6.0002934⟩. ⟨hal-04266493⟩
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Nomber of fulltexts
2 766
Nomber or references
3 293
Evolution
keywords
Tomography
Equation of state
Instrumentation
Silicon
Homogenization
Plasticity
Plasmas
Carbure de silicium
HPC
Radiation effects
Electron
Distributed and Quasi-distributed sensing
Laser plasma interaction
Thermal conductivity
Composites à matrice céramique
Tantalum
Filamentation
Mechanical properties
Nuclear Reactions
Microstructure
Simulation numérique
Oxidation
Oxydation
Ceramics
Durée de vie
Modeling
Ablation
Ionizing radiation
Silica
Fission
Composite materials
Spectroscopy
Chemical vapor infiltration
Interaction laser-matière
Calibration
Diffusion
Femtosecond laser
Ceramic matrix composite
Defects
Numerical simulation
Corrosion
Laser
SiC
CVI
Jezero crater
Inertial confinement fusion
Lasers
Fiber Bragg Grating
Lifetime
Mars
Endommagement
Molecular dynamics
Fusion par confinement inertiel
Composite
Simulation
Carbon
Boron nitride
Nanoparticles
Controls
Comportement mécanique
CMC
Characterization
Optical Fiber Sensor
Ytterbium
Shock waves
Ab initio
Nuclear Structure
Ultrafast lasers
Ceramic matrix composites
Chemical vapor deposition
Mechanical behavior
Temperature
Sintering
Slow crack growth
Plasma
Sensor
DFT
Interphase
Dépôt chimique en phase vapeur
Damage
Laser-matter interaction
CVD
Composites
Epos-France
Modélisation
Fluorescence
Hydrodynamics
MPI
Nonlinear optics
Radiation
Optical fibers
High pressure
Uncertainty quantification
Plasma light propagation
Plasma physics
Laser-plasma interaction
Static fatigue
Silicon carbide
Composite à matrice céramique
LIBS