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Click on the department name to consult its publications
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GREMAN - Groupe de Recherche en Matériaux,Microélectronique, Acoustique et Nanotechnologies (UMR 7347)
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LCPR - Laboratoire de Chimie Physique et Rayonnement (UMR E4)
Latest submissions
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Paule Durin, Olha Sysova, Alexandre Téolis, Stéphane Trombotto, Samar Hajjar-Garreau, et al.. Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2023, 41 (6), pp.062204. ⟨10.1116/6.0002934⟩. ⟨hal-04266493⟩
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Nomber of fulltexts
2 760
Nomber or references
3 293
Evolution
keywords
Lifetime
Filamentation
Hydrodynamics
Calibration
Mars
Temperature
Defects
Simulation numérique
Silicon carbide
Nuclear Structure
Interphase
Mechanical behavior
Homogenization
Damage
Fiber Bragg Grating
Radiation effects
Durée de vie
Microstructure
Silicon
Boron nitride
DFT
Optical Fiber Sensor
Optical fibers
Composite à matrice céramique
Carbure de silicium
Spectroscopy
High pressure
Characterization
Ultrafast lasers
Inertial confinement fusion
Laser-matter interaction
Plasticity
Mechanical properties
Tomography
Fission
Modeling
Endommagement
Silica
Corrosion
Nuclear Reactions
Interaction laser-matière
Sensor
Fluorescence
CMC
Thermal conductivity
Radiation
Femtosecond laser
Static fatigue
Chemical vapor infiltration
Lasers
Ceramic matrix composites
Tantalum
Laser-plasma interaction
Oxidation
LIBS
Shock waves
Carbon
Laser
MPI
Electron
Chemical vapor deposition
Nonlinear optics
Sintering
Simulation
Modélisation
HPC
Ceramics
Plasma
Composites à matrice céramique
Numerical simulation
Epos-France
Dépôt chimique en phase vapeur
Distributed and Quasi-distributed sensing
Composite materials
Instrumentation
Uncertainty quantification
Molecular dynamics
Nanoparticles
Ablation
Plasma physics
Equation of state
Ab initio
Ytterbium
Fusion par confinement inertiel
Composites
Laser plasma interaction
SiC
Diffusion
Ceramic matrix composite
CVI
Plasmas
Composite
Plasma light propagation
Ionizing radiation
Controls
Comportement mécanique
Oxydation
CVD
Jezero crater
Slow crack growth