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Hydrogen silsesquioxane tri-dimensional advanced patterning concepts for high density of integration in sub-7 nm nodes2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Apr 2017, Athens, Greece. pp.120-123, ⟨10.1109/ULIS.2017.7962617⟩
Conference papers
hal-02014232v1
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First demonstration of a back-side integrated heterogeneous hybrid III-V/Si DBR lasers for Si-photonics applications2016 IEEE International Electron Devices Meeting (IEDM), Dec 2016, San Francisco, United States. pp.22.2.1-22.2.4, ⟨10.1109/IEDM.2016.7838471⟩
Conference papers
hal-02019672v1
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(Invited) Evaluation of Stacked Nanowires Transistors for CMOS: Performance and Technology OpportunitiesECS Transactions, 2016, 72 (4), pp.43-54. ⟨10.1149/07204.0043ecst⟩
Journal articles
hal-02014062v1
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Back-side integration of Hybrid III–V on Silicon DBR lasers2017 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), Apr 2017, Hsinchu, Taiwan. pp.1-2, ⟨10.1109/VLSI-TSA.2017.7942492⟩
Conference papers
hal-02019688v1
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integrationMicro and Nano Engineering, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩
Journal articles
cea-03409432v1
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(Invited) Evaluation of Stacked Nanowires Transistors for CMOS: Performance and Technology Opportunities229th ECS Meeting: 6th Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications, F. Roozeboom, P.J. Timans, E.P. Gusev, V. Narayanan, K. Kakushima, Z. Karim, S. De Gendt, May 2016, San Diego, United States
Conference papers
hal-02014098v1
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