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Structure: Internal structure identifier : 466047

Hydrogen silsesquioxane tri-dimensional advanced patterning concepts for high density of integration in sub-7 nm nodes

L. Gaben , V. Balan , C. Euvrard , S. Pauliac , J.-A. Dallery , et al.
2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Apr 2017, Athens, Greece. pp.120-123, ⟨10.1109/ULIS.2017.7962617⟩
Conference papers hal-02014232v1

First demonstration of a back-side integrated heterogeneous hybrid III-V/Si DBR lasers for Si-photonics applications

J. Durel , B. Ben Bakir , C. Jany , S. Cremer , B. Szelag , et al.
2016 IEEE International Electron Devices Meeting (IEDM), Dec 2016, San Francisco, United States. pp.22.2.1-22.2.4, ⟨10.1109/IEDM.2016.7838471⟩
Conference papers hal-02019672v1

(Invited) Evaluation of Stacked Nanowires Transistors for CMOS: Performance and Technology Opportunities

L. Gaben , S. Barraud , M.-P. Samson , M.-A. Jaud , S. Martinie , et al.
ECS Transactions, 2016, 72 (4), pp.43-54. ⟨10.1149/07204.0043ecst⟩
Journal articles hal-02014062v1

Back-side integration of Hybrid III–V on Silicon DBR lasers

J. Durel , B. Ben Bakir , C. Jany , S. Cremer , K. Hassan , et al.
2017 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), Apr 2017, Hsinchu, Taiwan. pp.1-2, ⟨10.1109/VLSI-TSA.2017.7942492⟩
Conference papers hal-02019688v1
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration

Marie-Line Pourteau , Ahmed Gharbi , Pierre Brianceau , Jacques-Alexandre Dallery , Fabien Laulagnet , et al.
Micro and Nano Engineering, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩
Journal articles cea-03409432v1

(Invited) Evaluation of Stacked Nanowires Transistors for CMOS: Performance and Technology Opportunities

L. Gaben , S. Barraud , M.-P. Samson , M.-A. Jaud , S. Martinie , et al.
229th ECS Meeting: 6th Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications, F. Roozeboom, P.J. Timans, E.P. Gusev, V. Narayanan, K. Kakushima, Z. Karim, S. De Gendt, May 2016, San Diego, United States
Conference papers hal-02014098v1