Balancing Block Copolymer Thickness over Template Density in Graphoepitaxy Approach
Patricia Pimenta Barros
,
Ahmed Gharbi
,
Antoine Fouquet
,
Sandra Bos
,
Jérôme Hazart
,
et al.
Journal articles
cea-02111234v1
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Norme NF X43-902. Mai 2008. Biosurveillance de l'air. Biosurveillance passive de la qualité de l'air à l'aide de mousses autochtones : de la récolte à la préparation des échantillons
- van Haluwyn
,
Jean-Pierre J.-P. Garrec
,
- Asta
,
- Bernard
,
Antonio Bispo
,
et al.
AFNOR - Association Française de Normalisation, 13 p., 2008, Catalogue AFNOR
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hal-02820884v1
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Straightforward integration flow of a silicon containing block copolymer for line-space patterning
A. Legrain
,
G. Fleury
,
M. Mumtaz
,
C. Navarro
,
J. Arias-Zapata
,
et al.
ACS Applied Materials & Interfaces , 2017, vol. 9, p. 43043
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hal-01825510v1
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Recent Achievements in sub-10 nm DSA lithography for Line/Space patterning
C. Navarro
,
C. Nicolet
,
F. Ariura
,
X. Chevalier
,
K. Xu
,
et al.
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hal-01825083v1
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Pattern density multiplication by direct self assembly of block copolymers: Towards 300mm CMOS requirements
Raluca Tiron
,
Xavier Chevalier
,
Stéphanie Gaugiran
,
J. Pradelles
,
H. Fontaine
,
et al.
Proceedings of SPIE, the International Society for Optical Engineering , 2012, 8323, pp.83230O.
⟨10.1117/12.916400⟩
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hal-00817408v1
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Norme NF X 43-900. Mai 2008. Bio-indication de l'ozone par le tabac
C van Haluwyn
,
Jean-Pierre J.-P. Garrec
,
- Asta
,
- Bernard
,
Antonio Bispo
,
et al.
AFNOR - Association Française de Normalisation, 17 p., 2008, Catalogue AFNOR
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hal-02823990v1
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Pillars fabrication by DSA lithography: material and process options
Ahmed Gharbi
,
Patricia Pimenta-Barros
,
Olivia Saouaf
,
Gabriel Reynaud
,
Laurent Pain
,
et al.
Advances in Patterning Materials and Processes XXXV , Feb 2018, San Jose, United States. pp.105860Q,
⟨10.1117/12.2297414⟩
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cea-02087039v1
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Removal of poly(methyl methacrylate) in diblock copolymers films studied by grazing incidence small-angle X-ray scattering
Guillaume Freychet
,
Mireille Maret
,
Raluca Tiron
,
Xavier Chevalier
,
Ahmed Gharbi
,
et al.
Journal of Polymer Science Part B: Polymer Physics , 2016, 54 (12), pp.1137 - 1144.
⟨10.1002/polb.24017⟩
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hal-01446366v1
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Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study
Raluca Tiron
,
Xavier Chevalier
,
Christophe Couderc
,
Jonathan Pradelles
,
Jessy Bustos
,
et al.
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hal-00951472v1
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Norme NF X 43-901. Mai 2008. Biosurveillance de la qualité de l'air à l'aide de ray-grass : des cultures à la préparation des échantillons
C van Haluwyn
,
Jean-Pierre J.-P. Garrec
,
- Asta
,
- Bernard
,
Antonio Bispo
,
et al.
AFNOR - Association Française de Normalisation, 13 p., 2008, Catalogue AFNOR
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hal-02824852v1
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Norme NF X43-903. Mai 2008. Biosurveillance de l'environnement. Détermination d'un indice biologique de lichens épiphytes (IBLE).
- van Haluwyn
,
Jean-Pierre J.-P. Garrec
,
- Asta
,
- Bernard
,
Antonio Bispo
,
et al.
AFNOR - Association Française de Normalisation, 19 p., 2008, Catalogue AFNOR
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hal-02823576v1
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Vibrating Magnetic Particles for Cancer Cells Destruction
R. Morel
,
Caroline Thébault
,
Cécile Naud
,
Hélène Joisten
,
Selma Leulmi
,
et al.
Bio Inspired Magnetic Systems 2018 , Jul 2018, Exeter, France
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hal-02108783v1
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Self-organization and dewetting kinetics in sub-10 nm diblock copolymer line/space lithography
Xavier Chevalier
,
Gwenaelle Pound-Lana
,
Cindy Gomes Correia
,
Sébastien Cavalaglio
,
Benjamin Cabannes-Boué
,
et al.
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hal-04013897v1
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Design of new block-copolymer systems to achieve thick-films with defect-free structures for applications of DSA into lithographic large nodes
Xavier Chevalier
,
Paul Coupillaud
,
Geoffrey Lombard
,
Célia Nicolet
,
Julien Beausoleil
,
et al.
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIII , 9779, pp.Art. No. 977913, 2016, Book Series: Proceedings of SPIE, ISBN:978-1-5106-0014-0.
⟨10.1117/12.2219214⟩
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hal-01406087v1
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Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X-ray Scattering: The Attractive Case of Graphoepitaxy
Mireille Maret
,
Raluca Tiron
,
Xavier Chevalier
,
Patrice Gergaud
,
Ahmed Gharbi
,
et al.
Journal articles
hal-01369892v1
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Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)
Xavier Chevalier
,
Célia Nicolet
,
Raluca Tiron
,
Ahmed Gharbi
,
Maxime Argoud
,
et al.
Journal articles
hal-00926366v1
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