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Structure: Internal structure identifier : 214724
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Balancing Block Copolymer Thickness over Template Density in Graphoepitaxy Approach

Patricia Pimenta Barros , Ahmed Gharbi , Antoine Fouquet , Sandra Bos , Jérôme Hazart , et al.
Macromolecular Materials and Engineering, 2017, 302 (11), pp.1700285. ⟨10.1002/mame.201700285⟩
Journal articles cea-02111234v1

Norme NF X43-902. Mai 2008. Biosurveillance de l'air. Biosurveillance passive de la qualité de l'air à l'aide de mousses autochtones : de la récolte à la préparation des échantillons

- van Haluwyn , Jean-Pierre J.-P. Garrec , - Asta , - Bernard , Antonio Bispo , et al.
AFNOR - Association Française de Normalisation, 13 p., 2008, Catalogue AFNOR
Books hal-02820884v1

Straightforward integration flow of a silicon containing block copolymer for line-space patterning

A. Legrain , G. Fleury , M. Mumtaz , C. Navarro , J. Arias-Zapata , et al.
ACS Applied Materials & Interfaces, 2017, vol. 9, p. 43043
Journal articles hal-01825510v1

Recent Achievements in sub-10 nm DSA lithography for Line/Space patterning

C. Navarro , C. Nicolet , F. Ariura , X. Chevalier , K. Xu , et al.
Journal of Photopolymer Science and Technology, 2017, 30, pp.69-75. ⟨10.2494/photopolymer.30.69⟩
Journal articles hal-01825083v1

Pattern density multiplication by direct self assembly of block copolymers: Towards 300mm CMOS requirements

Raluca Tiron , Xavier Chevalier , Stéphanie Gaugiran , J. Pradelles , H. Fontaine , et al.
Proceedings of SPIE, the International Society for Optical Engineering, 2012, 8323, pp.83230O. ⟨10.1117/12.916400⟩
Journal articles hal-00817408v1

Norme NF X 43-900. Mai 2008. Bio-indication de l'ozone par le tabac

C van Haluwyn , Jean-Pierre J.-P. Garrec , - Asta , - Bernard , Antonio Bispo , et al.
AFNOR - Association Française de Normalisation, 17 p., 2008, Catalogue AFNOR
Books hal-02823990v1
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Pillars fabrication by DSA lithography: material and process options

Ahmed Gharbi , Patricia Pimenta-Barros , Olivia Saouaf , Gabriel Reynaud , Laurent Pain , et al.
Advances in Patterning Materials and Processes XXXV, Feb 2018, San Jose, United States. pp.105860Q, ⟨10.1117/12.2297414⟩
Conference papers cea-02087039v1

Removal of poly(methyl methacrylate) in diblock copolymers films studied by grazing incidence small-angle X-ray scattering

Guillaume Freychet , Mireille Maret , Raluca Tiron , Xavier Chevalier , Ahmed Gharbi , et al.
Journal of Polymer Science Part B: Polymer Physics, 2016, 54 (12), pp.1137 - 1144. ⟨10.1002/polb.24017⟩
Journal articles hal-01446366v1

Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study

Raluca Tiron , Xavier Chevalier , Christophe Couderc , Jonathan Pradelles , Jessy Bustos , et al.
Journal of Vacuum Science and Technology, 2011, 29 (6), pp.Art Nb: 06F206. ⟨10.1116/1.3659714⟩
Journal articles hal-00951472v1

Norme NF X 43-901. Mai 2008. Biosurveillance de la qualité de l'air à l'aide de ray-grass : des cultures à la préparation des échantillons

C van Haluwyn , Jean-Pierre J.-P. Garrec , - Asta , - Bernard , Antonio Bispo , et al.
AFNOR - Association Française de Normalisation, 13 p., 2008, Catalogue AFNOR
Books hal-02824852v1

Norme NF X43-903. Mai 2008. Biosurveillance de l'environnement. Détermination d'un indice biologique de lichens épiphytes (IBLE).

- van Haluwyn , Jean-Pierre J.-P. Garrec , - Asta , - Bernard , Antonio Bispo , et al.
AFNOR - Association Française de Normalisation, 19 p., 2008, Catalogue AFNOR
Books hal-02823576v1

Vibrating Magnetic Particles for Cancer Cells Destruction

R. Morel , Caroline Thébault , Cécile Naud , Hélène Joisten , Selma Leulmi , et al.
Bio Inspired Magnetic Systems 2018, Jul 2018, Exeter, France
Conference papers hal-02108783v1
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Self-organization and dewetting kinetics in sub-10 nm diblock copolymer line/space lithography

Xavier Chevalier , Gwenaelle Pound-Lana , Cindy Gomes Correia , Sébastien Cavalaglio , Benjamin Cabannes-Boué , et al.
Nanotechnology, 2023, 34 (17), pp.175602. ⟨10.1088/1361-6528/acb49f⟩
Journal articles hal-04013897v1

Design of new block-copolymer systems to achieve thick-films with defect-free structures for applications of DSA into lithographic large nodes

Xavier Chevalier , Paul Coupillaud , Geoffrey Lombard , Célia Nicolet , Julien Beausoleil , et al.
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIII, 9779, pp.Art. No. 977913, 2016, Book Series: Proceedings of SPIE, ISBN:978-1-5106-0014-0. ⟨10.1117/12.2219214⟩
Book sections hal-01406087v1

Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X-ray Scattering: The Attractive Case of Graphoepitaxy

Mireille Maret , Raluca Tiron , Xavier Chevalier , Patrice Gergaud , Ahmed Gharbi , et al.
Macromolecules, 2014, 47 (20), pp.7221-7229. ⟨10.1021/ma501453k⟩
Journal articles hal-01369892v1

Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)

Xavier Chevalier , Célia Nicolet , Raluca Tiron , Ahmed Gharbi , Maxime Argoud , et al.
Journal of Micro-Nanolitography MEMS and MOEMS, 2013, 12 (3), pp.Nb 031102. ⟨10.1117/1.JMM.12.3.031102⟩
Journal articles hal-00926366v1