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Structure: Internal structure identifier : 199048
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CMOS-compatible manufacturability of sub-15 nm Si/SiO$_2$/Si nanopillars containing single Si nanodots for single electron transistor applications

Johannes von Borany , Hans-Juergen Engelmann , Karl-Heinz Heinig , E. Amat , Gregor Hlawacek , et al.
Semiconductor Science and Technology, 2023, 38 (5), pp.055011. ⟨10.1088/1361-6641/acbe5d⟩
Journal articles cea-04170374v1

Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices

Anna Maria Beltrán , Sébastien Duguay , Christian Strenger , Anton J Bauer , Fuccio Cristiano , et al.
Solid State Communications, 2015, 221, pp.28-32. ⟨10.1016/j.ssc.2015.08.017⟩
Journal articles hal-01720451v1
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration

Marie-Line Pourteau , Ahmed Gharbi , Pierre Brianceau , Jacques-Alexandre Dallery , Fabien Laulagnet , et al.
Micro and Nano Engineering, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩
Journal articles cea-03409432v1

Process Variability for Devices at and Beyond the 7 nm Node

J. K Lorenz , A. Asenov , E. Bär , S. Barraud , C. Millar , et al.
ECS Transactions, 2018, 85 (8), pp.113-124. ⟨10.1149/08508.0113ecst⟩
Journal articles cea-02965940v1