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Precise control of template affinity achieved by UV-assisted graphoepitaxy approach on silicon nanowires applications

Patricia Pimenta-Barros , Guillaume Claveau , Maxime Argoud , Zdenek Chalupa , Nacima Allouti , et al.
Novel Patterning Technologies 2018, Feb 2018, San Jose, Canada. pp.11, ⟨10.1117/12.2297407⟩
Conference papers cea-02185301v1
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Balancing Block Copolymer Thickness over Template Density in Graphoepitaxy Approach

Patricia Pimenta Barros , Ahmed Gharbi , Antoine Fouquet , Sandra Bos , Jérôme Hazart , et al.
Macromolecular Materials and Engineering, 2017, 302 (11), pp.1700285. ⟨10.1002/mame.201700285⟩
Journal articles cea-02111234v1

New CH 4 -N 2 dry etch chemistry for poly(methyl methacrylate) removal without consuming polystyrene for lamellar copolymers application

Aurélien Sarrazin , Nicolas Posseme , Patricia Pimenta-Barros , Sebastien Barnola , Raluca Tiron , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2019, 37 (3), pp.030601. ⟨10.1116/1.5090395⟩
Journal articles hal-02387281v1