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authFullName_s : Zdenek Chalupa

Precise control of template affinity achieved by UV-assisted graphoepitaxy approach on silicon nanowires applications

Patricia Pimenta-Barros , Guillaume Claveau , Maxime Argoud , Zdenek Chalupa , Nacima Allouti , et al.
Novel Patterning Technologies 2018, Feb 2018, San Jose, Canada. pp.11, ⟨10.1117/12.2297407⟩
Conference papers cea-02185301v1

Confined selective lateral epitaxial growth of 16-nm thick Ge nanostructures on SOI substrates: Advantages and challenges

Rami Khazaka , Yann Bogumilowicz , Denis Rouchon , Hervé Boutry , Zdenek Chalupa , et al.
Applied Surface Science, 2018, 445, pp.77-80. ⟨10.1016/j.apsusc.2018.03.104⟩
Journal articles hal-01947859v1

Local lateral integration of 16-nm thick Ge nanowires on silicon on insulator substrates

Rami Khazaka , Yann Bogumilowicz , Anne-Marie Papon , Hugo Dansas , Hervé Boutry , et al.
Applied Physics Letters, 2018, 112 (24), pp.241602. ⟨10.1063/1.5034205⟩
Journal articles cea-02185226v1