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authFullName_s : Yannick Le Friec
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Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM

Philippe Rodriguez , Romain Famulok , Yannick Le Friec , Jean-Philippe Reynard , Benoit-Noël Bozon , et al.
Materials Science in Semiconductor Processing, 2017, 71, pp.433 - 440. ⟨10.1016/j.mssp.2017.08.033⟩
Journal articles cea-01586412v1

Raman spectroscopy and ellipsometry hybridization: application to GeSbTe crystallization measurement for in line control

Jon De Vecchy , Jean-Herve Tortai , Jérémy Moeyaert , Yannick Le Friec , Delphine Le Cunff , et al.
ECASIA 2022, May 2022, Limerick, Ireland
Conference papers hal-03777907v1