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authFullName_s : Valérie Lapras

Confined selective lateral epitaxial growth of 16-nm thick Ge nanostructures on SOI substrates: Advantages and challenges

Rami Khazaka , Yann Bogumilowicz , Denis Rouchon , Hervé Boutry , Zdenek Chalupa , et al.
Applied Surface Science, 2018, 445, pp.77-80. ⟨10.1016/j.apsusc.2018.03.104⟩
Journal articles hal-01947859v1

Methodology for Active Junction Profile Extraction in thin film FD-SOI Enabling performance driver identification in 500°C devices for 3D sequential integration

Tadeu Mota Frutuoso , Xavier Garros , Perrine Batude , Laurent Brunet , Joris Lacord , et al.
IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Jun 2022, Honolulu (HI), United States. ⟨10.1109/VLSITechnologyandCir46769.2022.9830504⟩
Conference papers hal-04069091v1

Local lateral integration of 16-nm thick Ge nanowires on silicon on insulator substrates

Rami Khazaka , Yann Bogumilowicz , Anne-Marie Papon , Hugo Dansas , Hervé Boutry , et al.
Applied Physics Letters, 2018, 112 (24), pp.241602. ⟨10.1063/1.5034205⟩
Journal articles cea-02185226v1