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Transmission measurements of multilayer interference filters developed for a full integration on Complementary Metal Oxide Semiconductor chipsThin Solid Films, 2017, 631, pp.23-28. ⟨10.1016/j.tsf.2017.03.055⟩
Journal articles
cea-02202452v1
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Direct Bonding Mechanism of ALD-Al 2 O 3 Thin FilmsECS Journal of Solid State Science and Technology, 2015, 4 (5), pp.P171-P175
Journal articles
hal-02016525v1
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Water Stress Corrosion in Bonded StructuresECS Journal of Solid State Science and Technology, 2015, 4 (5), pp.P124-P130. ⟨10.1149/2.0031505jss⟩
Journal articles
hal-02016558v1
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Adhesion Energy and Bonding Wave Velocity MeasurementsPRIME 2016, Oct 2016, Honolulu, United States. pp.145-152, ⟨10.1149/07509.0145ecst⟩
Conference papers
hal-01974477v1
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First demonstration of a back-side integrated heterogeneous hybrid III-V/Si DBR lasers for Si-photonics applications2016 IEEE International Electron Devices Meeting (IEDM), Dec 2016, San Francisco, United States. pp.22.2.1-22.2.4, ⟨10.1109/IEDM.2016.7838471⟩
Conference papers
hal-02019672v1
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Direct Bonding Mechanism of ALD-Al2O3 Thin Films13th International Symposium on Semiconductor Wafer Bonding - Science, Technology and Applications as part of the 226th Meeting of the Electrochem Soc, ECS, Oct 2014, Cancun, Mexico. pp.57-65, ⟨10.1149/06405.0057ecst⟩
Conference papers
hal-02015924v1
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Back-side integration of Hybrid III–V on Silicon DBR lasers2017 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), Apr 2017, Hsinchu, Taiwan. pp.1-2, ⟨10.1109/VLSI-TSA.2017.7942492⟩
Conference papers
hal-02019688v1
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Interface water diffusion in silicon direct bondingApplied Physics Letters, 2016, 109 (11), pp.111603. ⟨10.1063/1.4962464⟩
Journal articles
cea-01851936v1
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Edge Water Penetration in Direct Bonding InterfacePRiME 2016/230th ECS Meeting, Electrochemical Society, Oct 2016, Honolulu, United States. pp.163-167, ⟨10.1149/07509.0163ecst⟩
Conference papers
hal-02016077v1
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(Invited) Water Stress Corrosion in Bonded Structures13th International Symposium on Semiconductor Wafer Bonding - Science, Technology and Applications as part of the 226th Meeting of the Electrochem Soc, Oct 2014, Cancun, Mexico. pp.121-132
Conference papers
hal-02015940v1
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Impact of Water Edge Absorption on Silicon Oxide Direct Bonding EnergyPRIME 2016, Oct 2016, Honolulu, United States. pp.129-134, ⟨10.1149/07509.0129ecst⟩
Conference papers
hal-01974475v1
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