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authFullName_s : Stéfan Landis

Reflow dynamics of thin viscous films

Tanguy Lévéder , Stéfan Landis , Laurent Davoust
Applied Physics Letters, 2008, 92, pp.013107. ⟨10.1063/1.2828986⟩
Journal articles hal-00383681v1

Impact of planarization soft layers on full 200mm wafer imprinting uniformity

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Nicolas Chaix
5th International Conference on Nanoimprint and Nanoprint Technology (NNT 2006), Nov 2006, San Fransisco, United States
Conference papers hal-00203956v1

Resist viscosity measurement for accurate nano-imprint simulation

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Nicolas Chaix
32th International Conference on Micro- and Nano-Engineering (MNE 2006), 2006, Barcelona, Spain
Conference papers hal-00204005v1
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Flow property measurement for nanoimprint simulation

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Nicolas Chaix
Microelectronic Engineering, 2007, 84 (5-8), pp.928-931. ⟨10.1016/j.mee.2007.01.065⟩
Journal articles hal-00266796v1
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Impact of planarization sheet addition on full wafer printing uniformity

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Nicolas Chaix
MRS Online Proceedings Library, 2007, Symposium O – Nanostructured and Patterned Materials for Information Storage, 961, pp.0961-O02-06. ⟨10.1557/PROC-0961-O02-06⟩
Journal articles hal-00266800v1
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Reflow of supported sub-100 nm polymer films as a characterization process for Nano Imprint lithography

Tanguy Lévéder , Etienne Rognin , Stéfan Landis , Laurent Davoust
Microelectronic Engineering, 2011, 88 (8), pp.1867-1870. ⟨10.1016/j.mee.2011.01.078⟩
Journal articles hal-00640166v1

AFM characterization of annealed nanoimprinted patterns applied to rheological properties measurement of thin polymer films with shear rate control

Etienne Rognin , Stéfan Landis , Laurent Davoust
Microelectronic Engineering, 2013, 110, pp.274-277. ⟨10.1016/j.mee.2013.02.002⟩
Journal articles hal-00929783v1
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Mesure de viscosité de films de polymère confinés sub-100 nm

Tanguy Lévéder , Laurent Davoust , Stéfan Landis
18e Congrès Français de Mécanique, 2007, Grenoble, France
Conference papers hal-00266817v1
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Optimization of demolding temperature for throughput improvement of nanoimprint lithography

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Nicolas Chaix
Microelectronic Engineering, 2007, 84 (5-8), pp.953-957. ⟨10.1016/j.mee.2007.01.066⟩
Journal articles hal-00266803v1
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Viscoelastic properties measurements of thin polymer films from reflow of nanoimprinted patterns

Etienne Rognin , Stéfan Landis , Laurent Davoust
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2012, 30 (1), pp.011602. ⟨10.1116/1.3664088⟩
Journal articles hal-00675005v1
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Demolding strategy to improve the hot embossing throughput

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Sébastien Soulan , Nicolas Chaix
SPIE 6517 Advanced Lithography, 2007, San Jose, United States. ⟨10.1117/12.711151⟩
Conference papers hal-00266799v1

Post-demolding pattern reflow in hot-embossing lithography

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Nicolas Chaix
32th International Conference on Micro- and Nano-Engineering (MNE 2006), 2006, Barcelona, Spain
Conference papers hal-00204001v1

Oriented thick films of block copolymer made by multiple successive coatings: perforated lamellae versus oriented lamellae

Jian-Yuan Yu , Stéfan Landis , Philippe Fontaine , Jean Daillant , Patrick P. Guenoun
Soft Matter, In press, 16, pp.8179-8186. ⟨10.1039/D0SM00603C⟩
Journal articles cea-02915378v1
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Surface characterization of imprinted resist during demolding above glass transition temperature

Tanguy Lévéder , Stéfan Landis , Laurent Davoust , Sébastien Soulan , Jean-Hervé Tortai , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2007, 25 (6), pp.2365-2369. ⟨10.1116/1.2799975⟩
Journal articles hal-00266792v1
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Viscosity measurements of thin polymer films from reflow of spatially modulated nanoimprinted

Etienne Rognin , Stéfan Landis , Laurent Davoust
Physical Review E : Statistical, Nonlinear, and Soft Matter Physics, 2011, 84 (4), ⟨10.1103/PhysRevE.84.041805⟩
Journal articles hal-00664542v1

Nano-viscosimetry of thin polymer films from a linear stability model

Tanguy Lévéder , Stéfan Landis , Laurent Davoust
First European Conference on Microfluidics (MicroFlu'08), Dec 2008, Bologna, France. pp.Session O9-3 (liquid microflows)
Conference papers hal-00407367v1
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Dewetting of the residual layer of annealed nanoimprinted polystyrene films

Etienne Rognin , Stéfan Landis , Laurent Davoust
Microelectronic Engineering, 2015, 141, pp.198-202. ⟨10.1016/j.mee.2015.03.063⟩
Journal articles hal-01220243v1