Reflow dynamics of thin viscous films
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
Journal articles
hal-00383681v1
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Impact of planarization soft layers on full 200mm wafer imprinting uniformity
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Nicolas Chaix
5th International Conference on Nanoimprint and Nanoprint Technology (NNT 2006) , Nov 2006, San Fransisco, United States
Conference papers
hal-00203956v1
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Resist viscosity measurement for accurate nano-imprint simulation
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Nicolas Chaix
32th International Conference on Micro- and Nano-Engineering (MNE 2006) , 2006, Barcelona, Spain
Conference papers
hal-00204005v1
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Flow property measurement for nanoimprint simulation
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Nicolas Chaix
Journal articles
hal-00266796v1
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Impact of planarization sheet addition on full wafer printing uniformity
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Nicolas Chaix
MRS Online Proceedings Library , 2007, Symposium O – Nanostructured and Patterned Materials for Information Storage, 961, pp.0961-O02-06.
⟨10.1557/PROC-0961-O02-06⟩
Journal articles
hal-00266800v1
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Reflow of supported sub-100 nm polymer films as a characterization process for Nano Imprint lithography
Tanguy Lévéder
,
Etienne Rognin
,
Stéfan Landis
,
Laurent Davoust
Journal articles
hal-00640166v1
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AFM characterization of annealed nanoimprinted patterns applied to rheological properties measurement of thin polymer films with shear rate control
Etienne Rognin
,
Stéfan Landis
,
Laurent Davoust
Journal articles
hal-00929783v1
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Mesure de viscosité de films de polymère confinés sub-100 nm
Tanguy Lévéder
,
Laurent Davoust
,
Stéfan Landis
18e Congrès Français de Mécanique , 2007, Grenoble, France
Conference papers
hal-00266817v1
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Optimization of demolding temperature for throughput improvement of nanoimprint lithography
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Nicolas Chaix
Journal articles
hal-00266803v1
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Viscoelastic properties measurements of thin polymer films from reflow of nanoimprinted patterns
Etienne Rognin
,
Stéfan Landis
,
Laurent Davoust
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures , 2012, 30 (1), pp.011602.
⟨10.1116/1.3664088⟩
Journal articles
hal-00675005v1
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Demolding strategy to improve the hot embossing throughput
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Sébastien Soulan
,
Nicolas Chaix
Conference papers
hal-00266799v1
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Post-demolding pattern reflow in hot-embossing lithography
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Nicolas Chaix
32th International Conference on Micro- and Nano-Engineering (MNE 2006) , 2006, Barcelona, Spain
Conference papers
hal-00204001v1
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Oriented thick films of block copolymer made by multiple successive coatings: perforated lamellae versus oriented lamellae
Jian-Yuan Yu
,
Stéfan Landis
,
Philippe Fontaine
,
Jean Daillant
,
Patrick P. Guenoun
Journal articles
cea-02915378v1
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Surface characterization of imprinted resist during demolding above glass transition temperature
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Sébastien Soulan
,
Jean-Hervé Tortai
,
et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics , 2007, 25 (6), pp.2365-2369.
⟨10.1116/1.2799975⟩
Journal articles
hal-00266792v1
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Viscosity measurements of thin polymer films from reflow of spatially modulated nanoimprinted
Etienne Rognin
,
Stéfan Landis
,
Laurent Davoust
Journal articles
hal-00664542v1
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Nano-viscosimetry of thin polymer films from a linear stability model
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
First European Conference on Microfluidics (MicroFlu'08) , Dec 2008, Bologna, France. pp.Session O9-3 (liquid microflows)
Conference papers
hal-00407367v1
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Dewetting of the residual layer of annealed nanoimprinted polystyrene films
Etienne Rognin
,
Stéfan Landis
,
Laurent Davoust
Journal articles
hal-01220243v1
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