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A route for industry-compatible directed self-assembly of high-chi PS-PDMS block copolymers
S. Böhme
,
C. Girardot
,
J. Garnier
,
J. Arias-Zapata
,
S. Arnaud
,
et al.
SPIE Advanced Lithography conference – Alternative Lithographic Technologies, Feb 2016, San Jose, United States
Conference poster
hal-01882740v1
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Development of plasma etching processes for the integration of III-V semicondutors as trigate nMOSFET’s channels
M. Bizouerne
,
E. Pargon
,
P. Burtin
,
C. Petit-Etienne
,
E. Latu-Romain
,
et al.
Plasma Etch and Strip in Microelectronics (PESM), 9th International Workshop, May 2016, Grenoble, France
Conference papers
hal-01882457v1
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Chlorine-based etching of InP laser : effect of plasma chemistry on sidewall roughness and damages
G. Gay
,
E. Pargon
,
C. Petit-Etienne
,
M. Brihoum
,
S. Barnola
,
et al.
65th International AVS Symposium & Topical Conferences, Nov 2016, Nashville, USA, United States
Conference papers
hal-01882766v1
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Spatially correlated structural and optical characterization of a single InGaAs quantum well fin selectively grown on Si by microscopy and cathodoluminescence techniques
S. David
,
J. Roque
,
N. Rochat
,
N. Bernier
,
L. Piot
,
et al.
Journal articles
hal-01881951v1
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Evolutions structurales au sein d'un alliage de zirconium oxyde a haute temperature en diffraction des rayons X in situ au rayonnement synchrotron
R. Guillou
,
Jl. Bechade
,
M. Lesaux
,
R. Guinebretière
,
Olivier Castelnau
,
et al.
La metallurgie, quel avenir, Apr 2019, Nancy, France
Conference papers
hal-02411055v1
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Plasma etching optimization and alignment control of directed self-assembled high-Χ cylindrical PS-PDMS
S. Böhme
,
J. Garnier
,
C. Girardot
,
J. Arias-Zapata
,
S. Arnaud
,
et al.
European Materials Research Society conference- E-MRS 2015, Spring Meeting, May 2015, Lille, France
Conference papers
hal-01877841v1
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DSA pattern transfer with PS-PMMA and silicon-containing block copolymers
S. Böhme
,
P. Bézard
,
C. Girardot
,
J. Garnier
,
J. Arias-Zapata
,
et al.
SPIE-Advanced Lithography, San Jose (US), 24-26 October 2016, Oct 2016, San Jose, United States
Conference papers
hal-01881984v1
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MOCVD Epitaxy and Characterization of III-As and III-P Thin Layers on 300mm Silicon Substrate
Mickael Martin
,
Romain Cipro
,
M. Billaud
,
Jérémy Moeyaert
,
Franck Bassani
,
et al.
MRS Spring Meeting, Apr 2015, San Francisco, California, United States. 2015
Conference poster
hal-01489617v1
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Etude in-situ resolue en temps par diffraction des rayons X sous rayonnement synchrotron des evolutions structurales au sein d'un alliage de zirconium oxyde a haute temperature
R. Guillou
,
M. Lesaux
,
Jl. Bechade
,
R. Guinebretière
,
Olivier Castelnau
,
et al.
Materiaux 2018, Nov 2018, Strasbourg, France
Conference papers
cea-02400186v1
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A route for industry-compatible DSA of high-chi PS-PDMS block copolymers
S. Böhme
,
C. Girardot
,
J. Garnier
,
J. Arias-Zapata
,
S. Arnaud
,
et al.
China Semiconductor Technology International Conference – CSTIC 2016, Mar 2016, Shanghai (Chine), China
Conference papers
hal-01882495v1
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Directed self-assembly process for high-X PS-b-PDMS diblock copolymer compatible with microelectronics environment
J. Garnier
,
S. Böhme
,
C. Girardot
,
S. Arnaud
,
J. Arias-Zapatta
,
et al.
European Materials Research Society conference- E-MRS 2015, Spring Meeting, May 2015, Lille, France
Conference papers
hal-01877293v1
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