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authFullName_s : Philippe Essomba

Progress and process improvements for multiple electron-beam direct write

Isabelle Servin , Marie-Line Pourteau , Jonathan Pradelles , Philippe Essomba , Ludovic Lattard , et al.
Japanese Journal of Applied Physics, 2017, 56 (6), ⟨10.7567/JJAP.56.06GC03⟩
Journal articles cea-02202410v1