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Precise control of template affinity achieved by UV-assisted graphoepitaxy approach on silicon nanowires applications
Patricia Pimenta-Barros
,
Guillaume Claveau
,
Maxime Argoud
,
Zdenek Chalupa
,
Nacima Allouti
,
et al.
Conference papers
cea-02185301v1
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Recent Developments and Prospects of Fully Recessed MIS Gate Structures for GaN on Si Power Transistors
Pedro Fernandes Paes Pinto Rocha
,
Laura Vauche
,
Patricia Pimenta-Barros
,
Simon Ruel
,
René Escoffier
,
et al.
Journal articles
hal-04215264v1
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PMMA removal selectivity to polystyrene using dry etch approach
Aurélien Sarrazin
,
Nicolas Posseme
,
Patricia Pimenta-Barros
,
Sébastien Barnola
,
Ahmed Gharbi
,
et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2016, 34, pp.061802. ⟨10.1116/1.4964881⟩
Journal articles
hal-01723375v1
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New CH 4 -N 2 dry etch chemistry for poly(methyl methacrylate) removal without consuming polystyrene for lamellar copolymers application
Aurélien Sarrazin
,
Nicolas Posseme
,
Patricia Pimenta-Barros
,
Sebastien Barnola
,
Raluca Tiron
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et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2019, 37 (3), pp.030601. ⟨10.1116/1.5090395⟩
Journal articles
hal-02387281v1
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DLTFS investigation of electron traps on AlGaN/GaN on Si Power diodes
Florian Rigaud-Minet
,
Christophe Raynaud
,
Julien Buckley
,
Matthew Charles
,
Patricia Pimenta-Barros
,
et al.
Journal articles
cea-03968526v1
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Pillars fabrication by DSA lithography: material and process options
Ahmed Gharbi
,
Patricia Pimenta-Barros
,
Olivia Saouaf
,
Gabriel Reynaud
,
Laurent Pain
,
et al.
Advances in Patterning Materials and Processes XXXV, Feb 2018, San Jose, United States. pp.105860Q, ⟨10.1117/12.2297414⟩
Conference papers
cea-02087039v1
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Block copolymer selectivity: A new dry etch approach for cylindrical applications
Aurélien Sarrazin
,
Nicolas Posseme
,
Patricia Pimenta-Barros
,
Sebastien Barnola
,
Ahmed Gharbi
,
et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2018, 36 (4), ⟨10.1116/1.5034133⟩
Journal articles
hal-01860237v1
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Etching of sub-10 nm half-pitch high chi block copolymers for directed self-assembly (DSA) application
Maria Gabriela Gusmão Cacho
,
Patricia Pimenta-Barros
,
Maxime Argoud
,
Christophe Navarro
,
Kaumba Sakavuyi
,
et al.
Journal articles
hal-03490365v1
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Analytic model of Vth recovery in MISGate recess high electron mobility transistor after blocking voltage stress
René Escoffier
,
Marc Orsatelli
,
Emmanuel Marcault
,
Julien Buckley
,
Romain Gwoziecki
,
et al.
Journal articles
cea-03714433v1
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