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authFullName_s : Patricia Pimenta-Barros

Precise control of template affinity achieved by UV-assisted graphoepitaxy approach on silicon nanowires applications

Patricia Pimenta-Barros , Guillaume Claveau , Maxime Argoud , Zdenek Chalupa , Nacima Allouti , et al.
Novel Patterning Technologies 2018, Feb 2018, San Jose, Canada. pp.11, ⟨10.1117/12.2297407⟩
Conference papers cea-02185301v1

Recent Developments and Prospects of Fully Recessed MIS Gate Structures for GaN on Si Power Transistors

Pedro Fernandes Paes Pinto Rocha , Laura Vauche , Patricia Pimenta-Barros , Simon Ruel , René Escoffier , et al.
Energies, 2023, 16 (7), pp.2978. ⟨10.3390/en16072978⟩
Journal articles hal-04215264v1
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PMMA removal selectivity to polystyrene using dry etch approach

Aurélien Sarrazin , Nicolas Posseme , Patricia Pimenta-Barros , Sébastien Barnola , Ahmed Gharbi , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2016, 34, pp.061802. ⟨10.1116/1.4964881⟩
Journal articles hal-01723375v1

New CH 4 -N 2 dry etch chemistry for poly(methyl methacrylate) removal without consuming polystyrene for lamellar copolymers application

Aurélien Sarrazin , Nicolas Posseme , Patricia Pimenta-Barros , Sebastien Barnola , Raluca Tiron , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2019, 37 (3), pp.030601. ⟨10.1116/1.5090395⟩
Journal articles hal-02387281v1
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DLTFS investigation of electron traps on AlGaN/GaN on Si Power diodes

Florian Rigaud-Minet , Christophe Raynaud , Julien Buckley , Matthew Charles , Patricia Pimenta-Barros , et al.
Energies, 2022, 16, pp.599. ⟨10.3390/en16020599⟩
Journal articles cea-03968526v1
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Pillars fabrication by DSA lithography: material and process options

Ahmed Gharbi , Patricia Pimenta-Barros , Olivia Saouaf , Gabriel Reynaud , Laurent Pain , et al.
Advances in Patterning Materials and Processes XXXV, Feb 2018, San Jose, United States. pp.105860Q, ⟨10.1117/12.2297414⟩
Conference papers cea-02087039v1
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Block copolymer selectivity: A new dry etch approach for cylindrical applications

Aurélien Sarrazin , Nicolas Posseme , Patricia Pimenta-Barros , Sebastien Barnola , Ahmed Gharbi , et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2018, 36 (4), ⟨10.1116/1.5034133⟩
Journal articles hal-01860237v1
Image document

Etching of sub-10 nm half-pitch high chi block copolymers for directed self-assembly (DSA) application

Maria Gabriela Gusmão Cacho , Patricia Pimenta-Barros , Maxime Argoud , Christophe Navarro , Kaumba Sakavuyi , et al.
Microelectronic Engineering, 2020, 230, pp.111369 -. ⟨10.1016/j.mee.2020.111369⟩
Journal articles hal-03490365v1

Analytic model of Vth recovery in MISGate recess high electron mobility transistor after blocking voltage stress

René Escoffier , Marc Orsatelli , Emmanuel Marcault , Julien Buckley , Romain Gwoziecki , et al.
MDPI , 2021, 15 (Energies 2022), pp.677. ⟨10.3390/en15030677⟩
Journal articles cea-03714433v1