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Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure FabricationACS Applied Nano Materials, 2022, 5 (7), pp.9818-9828. ⟨10.1021/acsanm.2c02013⟩
Journal articles
hal-03927264v1
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Pillars fabrication by DSA lithography: material and process optionsAdvances in Patterning Materials and Processes XXXV, Feb 2018, San Jose, United States. pp.105860Q, ⟨10.1117/12.2297414⟩
Conference papers
cea-02087039v1
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