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authFullName_s : Maxime Argoud
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Mécanismes de collage et de transfert de films monocristallins dans des structures à couches de polymères

Maxime Argoud
Autre. Université de Grenoble, 2012. Français. ⟨NNT : 2012GRENI083⟩
Theses tel-00848111v1
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PMMA removal selectivity to polystyrene using dry etch approach

Aurélien Sarrazin , Nicolas Posseme , Patricia Pimenta-Barros , Sébastien Barnola , Ahmed Gharbi , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2016, 34, pp.061802. ⟨10.1116/1.4964881⟩
Journal articles hal-01723375v1

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Isabelle Servin , Raluca Tiron , Ahmed Gharbi , Maxime Argoud , Karine Jullian , et al.
Japanese Journal of Applied Physics, 2014, 53 (6S), ⟨10.7567/JJAP.53.06JC05⟩
Journal articles hal-01798622v1

Precise control of template affinity achieved by UV-assisted graphoepitaxy approach on silicon nanowires applications

Patricia Pimenta-Barros , Guillaume Claveau , Maxime Argoud , Zdenek Chalupa , Nacima Allouti , et al.
Novel Patterning Technologies 2018, Feb 2018, San Jose, Canada. pp.11, ⟨10.1117/12.2297407⟩
Conference papers cea-02185301v1
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Block copolymer selectivity: A new dry etch approach for cylindrical applications

Aurélien Sarrazin , Nicolas Posseme , Patricia Pimenta-Barros , Sebastien Barnola , Ahmed Gharbi , et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2018, 36 (4), ⟨10.1116/1.5034133⟩
Journal articles hal-01860237v1
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Etching of sub-10 nm half-pitch high chi block copolymers for directed self-assembly (DSA) application

Maria Gabriela Gusmão Cacho , Patricia Pimenta-Barros , Maxime Argoud , Christophe Navarro , Kaumba Sakavuyi , et al.
Microelectronic Engineering, 2020, 230, pp.111369 -. ⟨10.1016/j.mee.2020.111369⟩
Journal articles hal-03490365v1

Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)

Xavier Chevalier , Célia Nicolet , Raluca Tiron , Ahmed Gharbi , Maxime Argoud , et al.
Journal of Micro-Nanolitography MEMS and MOEMS, 2013, 12 (3), pp.Nb 031102. ⟨10.1117/1.JMM.12.3.031102⟩
Journal articles hal-00926366v1