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authFullName_s : Marie-Line Pourteau

Progress and process improvements for multiple electron-beam direct write

Isabelle Servin , Marie-Line Pourteau , Jonathan Pradelles , Philippe Essomba , Ludovic Lattard , et al.
Japanese Journal of Applied Physics, 2017, 56 (6), ⟨10.7567/JJAP.56.06GC03⟩
Journal articles cea-02202410v1
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CMOS-compatible manufacturability of sub-15 nm Si/SiO$_2$/Si nanopillars containing single Si nanodots for single electron transistor applications

Johannes von Borany , Hans-Juergen Engelmann , Karl-Heinz Heinig , E. Amat , Gregor Hlawacek , et al.
Semiconductor Science and Technology, 2023, 38 (5), pp.055011. ⟨10.1088/1361-6641/acbe5d⟩
Journal articles cea-04170374v1
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration

Marie-Line Pourteau , Ahmed Gharbi , Pierre Brianceau , Jacques-Alexandre Dallery , Fabien Laulagnet , et al.
Micro and Nano Engineering, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩
Journal articles cea-03409432v1

CMOS compatible manufacturing of a hybrid SET-FET circuit

Alberto del Moral , Esteve Amat , Hans-Juergen Engelmann , Marie-Line Pourteau , Guido RADEMAKER , et al.
Journal of Semiconductor Science and Technology, 2022, 37, pp.125014. ⟨10.1088/1361-6641/ac9f61⟩
Journal articles cea-04174052v1