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Dielectric charging phenomena in diamond films used in RF MEMS capacitive switches: The effect of film thicknessMicroelectronics Reliability, 2016, 64, pp.660 - 664. ⟨10.1016/j.microrel.2016.07.053⟩
Journal articles
hal-01868745v1
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Electrical assessment of diamond MIM capacitors and modeling of MEMS capacitive switch dischargingJournal of Micromechanics and Microengineering, 2014, 24 (11), ⟨10.1088/0960-1317/24/11/115017⟩
Journal articles
cea-01841455v1
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Electrical characterization of undoped diamond films for RF MEMS application2013 IEEE International Reliability Physics Symposium (IRPS), Apr 2013, Anaheim, United States. pp.6532049, ⟨10.1109/IRPS.2013.6532049⟩
Conference papers
hal-01902644v1
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Reliability of nanocrystalline diamond MEMS capacitive switches2013 European Microwave Integrated Circuit Conference, Oct 2013, Nuremberg, Germany. pp.364-367
Conference papers
cea-01844712v1
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