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authFullName_s : M. Heitzmann

Seventy-fold enhancement of light extraction from a defectless photonic crystal made on silicon-on-insulator

M. Zelsmann , E. Picard , T. Charvolin , E. Hadji , M. Heitzmann , et al.
Applied Physics Letters, 2003, vol. 83, p. 2542
Journal articles hal-00390520v1

Development Program of EUV Mask in PREUVE

J.y Robic , P. Besson , Y. Gobil , M. Heitzmann , E. Quesnel , et al.
2nd International EUV Lithography Workshop, 2000, San Francisco, United States
Conference papers hal-00494562v1

Broadband optical characterization and modeling of photonic crystal waveguides for silicon optical interconnects

M. Zelsmann , E. Picard , T. Charvolin , E. Hadji , M. Heitzmann , et al.
Journal of Applied Physics, 2004, vol. 95, p. 1606
Journal articles hal-00390521v1

Solid–liquid equilibria in the ternary system NaBO2–NaOH–H2O thermal behavior of double salts

T. Vilarinho-Franco , A. Teyssier , R. Tenu , J. Pécaut , J. Delmas , et al.
Fluid Phase Equilibria, 2013, 360, pp.212-221. ⟨10.1016/j.fluid.2013.09.035⟩
Journal articles hal-02319963v1

HgCdTe molecular beam epitaxy material for microcavity light emitters: Application to gas detection in the 2–6 µm range

M. Zelsmann , T. Charvolin , M. Heitzmann , B. Dal’zotto , M. Nier , et al.
Journal of Electronic Materials, 2003, 32 (7), pp.602-607
Journal articles cea-01996933v1

Lifetime Analysis of a Hydrogen Generator by Hydrolysis of Sodium Borohydride

T. Vilarinho-Franco , R. Tenu , J. Delmas , M. Heitzmann , P. Capron , et al.
Energy Procedia, 2013, 36, pp.1192-1201. ⟨10.1016/j.egypro.2013.07.135⟩
Journal articles hal-02870384v1

Challenges in gate etching for sub 0.1 µm ultra large scale integration technology

O. Joubert , L. Vallier , M. Bonvalot , L. Desvoires , P. Gouraud , et al.
ICMI 2000, First International Conferences on Microelectronics and Interfaces, 2000, santa clara, United States
Conference papers hal-00494537v1

Challenges in plasma etching for Nanoelectronics applications

O. Joubert , M. Helot , M. Kogelschatz , A. Le Gouil , N. Possémé , et al.
6émes Rencontres du CREMSI, 2003, Fuveau, France
Conference papers hal-00481917v1