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authFullName_s : Jonathan Pradelles
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Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions

Mohamed Abaidi , Jordan Belissard , Nivea Schuch , Thiago Figueiro , Matthieu Millequant , et al.
SPIE Advanced Lithography, Feb 2021, Online Only, France. pp.36, ⟨10.1117/12.2584040⟩
Conference papers hal-03156540v1

Progress and process improvements for multiple electron-beam direct write

Isabelle Servin , Marie-Line Pourteau , Jonathan Pradelles , Philippe Essomba , Ludovic Lattard , et al.
Japanese Journal of Applied Physics, 2017, 56 (6), ⟨10.7567/JJAP.56.06GC03⟩
Journal articles cea-02202410v1

Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study

Raluca Tiron , Xavier Chevalier , Christophe Couderc , Jonathan Pradelles , Jessy Bustos , et al.
Journal of Vacuum Science and Technology, 2011, 29 (6), pp.Art Nb: 06F206. ⟨10.1116/1.3659714⟩
Journal articles hal-00951472v1

Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X-ray Scattering: The Attractive Case of Graphoepitaxy

Mireille Maret , Raluca Tiron , Xavier Chevalier , Patrice Gergaud , Ahmed Gharbi , et al.
Macromolecules, 2014, 47 (20), pp.7221-7229. ⟨10.1021/ma501453k⟩
Journal articles hal-01369892v1

Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)

Xavier Chevalier , Célia Nicolet , Raluca Tiron , Ahmed Gharbi , Maxime Argoud , et al.
Journal of Micro-Nanolitography MEMS and MOEMS, 2013, 12 (3), pp.Nb 031102. ⟨10.1117/1.JMM.12.3.031102⟩
Journal articles hal-00926366v1