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Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions
Mohamed Abaidi
,
Jordan Belissard
,
Nivea Schuch
,
Thiago Figueiro
,
Matthieu Millequant
,
et al.
Conference papers
hal-03156540v1
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Progress and process improvements for multiple electron-beam direct write
Isabelle Servin
,
Marie-Line Pourteau
,
Jonathan Pradelles
,
Philippe Essomba
,
Ludovic Lattard
,
et al.
Journal articles
cea-02202410v1
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Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study
Raluca Tiron
,
Xavier Chevalier
,
Christophe Couderc
,
Jonathan Pradelles
,
Jessy Bustos
,
et al.
Journal articles
hal-00951472v1
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Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X-ray Scattering: The Attractive Case of Graphoepitaxy
Mireille Maret
,
Raluca Tiron
,
Xavier Chevalier
,
Patrice Gergaud
,
Ahmed Gharbi
,
et al.
Journal articles
hal-01369892v1
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Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)
Xavier Chevalier
,
Célia Nicolet
,
Raluca Tiron
,
Ahmed Gharbi
,
Maxime Argoud
,
et al.
Journal articles
hal-00926366v1
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