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Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared ImagingMicromachines, 2018, 9 (8), pp.401. ⟨10.3390/mi9080401⟩
Journal articles
cea-02184472v1
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12 − μ m -Pitch Electromechanical Resonator for Thermal SensingPhysical Review Applied, 2018, 9 (2), ⟨10.1103/PhysRevApplied.9.024016⟩
Journal articles
cea-02184533v1
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LiTaO3/Silicon Composite Wafers for the Fabrication of Low Loss Low TCF High Coupling Resonators for Filter ApplicationsPhysics Procedia, 2015, 2015 ICU International Congress on Ultrasonics May 2015 Metz, 70, pp.1007 - 1011. ⟨10.1016/j.phpro.2015.08.210⟩
Journal articles
hal-02993743v1
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