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authFullName_s : Gaëlle Chamiot-Maitral

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Isabelle Servin , Raluca Tiron , Ahmed Gharbi , Maxime Argoud , Karine Jullian , et al.
Japanese Journal of Applied Physics, 2014, 53 (6S), ⟨10.7567/JJAP.53.06JC05⟩
Journal articles hal-01798622v1

Precise control of template affinity achieved by UV-assisted graphoepitaxy approach on silicon nanowires applications

Patricia Pimenta-Barros , Guillaume Claveau , Maxime Argoud , Zdenek Chalupa , Nacima Allouti , et al.
Novel Patterning Technologies 2018, Feb 2018, San Jose, Canada. pp.11, ⟨10.1117/12.2297407⟩
Conference papers cea-02185301v1