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Plasma immersion ion implantation (PIII): New path for optimizing doping profiles of advanced phosphorus emitters
Antoine Veau
,
Thibaut Desrues
,
Adeline Lanterne
,
Pierre Bellanger
,
Frank Torregrosa
,
et al.
SiliconPV 2018: 8th International Conference on Silicon Photovoltaics, Mar 2018, Lausanne, Switzerland. pp.110007, ⟨10.1063/1.5049316⟩
Conference papers
hal-01959074v1
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4H-SiC P+N UV Photodiodes : A Comparison between Beam and Plasma Doping Processes
Stéphane Biondo
,
Laurent Ottaviani
,
Mihai Lazar
,
Dominique Planson
,
Julian Duchaine
,
et al.
Journal articles
hal-02275699v1
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Electrical characteristics of SiC UV-Photodetector device : from the p-i-n structure behaviour to the Junction Barrier Schottky structure behaviour
Stéphane Biondo
,
Mihai Lazar
,
Laurent Ottaviani
,
Wilfried Vervisch
,
Olivier Palais
,
et al.
Conference papers
hal-00661511v1
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Phosphorus emitter engineering by plasma-immersion ion implantation for c-Si solar cells
Thomas Michel
,
Jerome Le Perchec
,
Adeline Lanterne
,
Rémi Monna
,
Frank Torregrosa
,
et al.
Journal articles
cea-02570721v1
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Hydrogenation of sputtered ZnO:Al layers for double side poly-Si/SiOx solar cells
Charles Seron
,
Thibaut Desrues
,
Frederic Jay
,
Adeline Lanterne
,
Frank Torregrosa
,
et al.
Journal articles
hal-03649761v1
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Plasma‐immersion ion implantation: A path to lower the annealing temperature of implanted boron emitters and simplify PERT solar cell processing
Adeline Lanterne
,
Thibaut Desrues
,
Coralie Lorfeuvre
,
Marianne Coig
,
Frank Torregrosa
,
et al.
Journal articles
cea-02570680v1
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4H-SiC P +N UV photodiodes: A comparison between beam and plasma doping processes
Stéphane Biondo
,
Laurent Ottaviani
,
Mihai Lazar
,
Dominique Planson
,
Julian Duchaine
,
et al.
CSCRM, Sep 2011, Cleveland, United States
Conference papers
hal-00747301v1
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Implantation-induced structural defects in highly activated USJs: Boron precipitation and trapping in pre-Amorphised silicon
Fuccio Cristiano
,
Zahi Essa
,
Yang Qiul
,
Yohann Spiegel
,
Frank Torregrosa
,
et al.
Conference papers
hal-01928869v1
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4H-SiC P+N UV Photodiodes for Space Applications
B. Berenguier
,
Laurent Ottaviani
,
Stéphane Biondo
,
Mihai Lazar
,
Frédéric Milesi
,
et al.
Journal articles
hal-01391847v1
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Influence of P+ layer parameters on 4H-SiC UV PiN photodetector characteristics
Laurent Ottaviani
,
Stéphane Biondo
,
Mihai Lazar
,
Wilfried Vervisch
,
Julian Duchaine
,
et al.
WOCSDICE, May 2011, Catania, Italy. pp.181
Conference papers
hal-00661522v1
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