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authFullName_s : Flore Boyer
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Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM

Philippe Rodriguez , Romain Famulok , Yannick Le Friec , Jean-Philippe Reynard , Benoit-Noël Bozon , et al.
Materials Science in Semiconductor Processing, 2017, 71, pp.433 - 440. ⟨10.1016/j.mssp.2017.08.033⟩
Journal articles cea-01586412v1
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Tntegration of CMOS-compatible contacts on III-V materials for photonic devices on silicon using 300 mm platform

Flore Boyer
Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes [2020-..], 2020. English. ⟨NNT : 2020GRALT068⟩
Theses tel-03206160v1