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authFullName_s : Fabien Laulagnet
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration

Marie-Line Pourteau , Ahmed Gharbi , Pierre Brianceau , Jacques-Alexandre Dallery , Fabien Laulagnet , et al.
Micro and Nano Engineering, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩
Journal articles cea-03409432v1