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authFullName_s : Cyril Guedj

Homo-epitaxial growth of LiNbO3 thin films by Pulsed Laser deposition

Laura Sauze , Nicolas Vaxelaire , Roselyne Templier , Denis Rouchon , François Pierre , et al.
Journal of Crystal Growth, 2023, 601, pp.126950. ⟨10.1016/j.jcrysgro.2022.126950⟩
Journal articles hal-03862259v1

Understanding of a new approach for silicon nitride spacer etching using gaseous hydrofluoric acid after hydrogen ion implantation

Vincent Ah-Leung , Olivier Pollet , Nicolas Posseme , Maxime Garcia Barros , Névine Rochat , et al.
Journal of Vacuum Science & Technology A, 2017, 35 (2), pp.021408. ⟨10.1116/1.4977077⟩
Journal articles cea-02202455v1

Impact of Hydrogen on Graphene-based Materials: Atomistic Modeling and Simulation of HRSTEM Images

Cyril Guedj , Léonard Jaillet , François Rousse , Stephane Redon
AVS 65th International Symposium & Exhibition, Oct 2018, Long Beach, United States
Conference papers hal-01973651v1
Image document

Thin layer etching of low-k SiCO spacer using hydrogen ion implantation followed by hydrofluoric acid

Nicolas Posseme , Maxime Garcia-Barros , François Leverd , Daniel Benoit , Olivier Pollet , et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2018, 36 (5), pp.052201. ⟨10.1116/1.5038617⟩
Journal articles cea-02185184v1
Image document

Impact of patterning and ashing on electrical properties and reliability of interconnects in porous SiOCH ultra low-k dielectric materials

Mohamed Aimadeddine , Vincent Arnal , Alexis Farcy , Cyril Guedj , Thierry Chevolleau , et al.
Microelectronic Engineering, 2005, 82 (3-4), pp.341-347. ⟨10.1016/j.mee.2005.07.015⟩
Journal articles hal-00462654v1

Atomistic Modelling and Simulation of Transmission Electron Microscopy Images: Application to Intrinsic Defects of Graphene

Cyril Guedj , Léonard Jaillet , François Rousse , Stephane Redon
SIMULTECH 2018 - 8th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, Jul 2018, Porto, Portugal. ⟨10.5220/0006829200150024⟩
Conference papers hal-01973626v1