Homo-epitaxial growth of LiNbO3 thin films by Pulsed Laser deposition
Laura Sauze
,
Nicolas Vaxelaire
,
Roselyne Templier
,
Denis Rouchon
,
François Pierre
,
et al.
Journal articles
hal-03862259v1
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Understanding of a new approach for silicon nitride spacer etching using gaseous hydrofluoric acid after hydrogen ion implantation
Vincent Ah-Leung
,
Olivier Pollet
,
Nicolas Posseme
,
Maxime Garcia Barros
,
Névine Rochat
,
et al.
Journal articles
cea-02202455v1
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Impact of Hydrogen on Graphene-based Materials: Atomistic Modeling and Simulation of HRSTEM Images
Cyril Guedj
,
Léonard Jaillet
,
François Rousse
,
Stephane Redon
AVS 65th International Symposium & Exhibition , Oct 2018, Long Beach, United States
Conference papers
hal-01973651v1
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Thin layer etching of low-k SiCO spacer using hydrogen ion implantation followed by hydrofluoric acid
Nicolas Posseme
,
Maxime Garcia-Barros
,
François Leverd
,
Daniel Benoit
,
Olivier Pollet
,
et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures , 2018, 36 (5), pp.052201.
⟨10.1116/1.5038617⟩
Journal articles
cea-02185184v1
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Impact of patterning and ashing on electrical properties and reliability of interconnects in porous SiOCH ultra low-k dielectric materials
Mohamed Aimadeddine
,
Vincent Arnal
,
Alexis Farcy
,
Cyril Guedj
,
Thierry Chevolleau
,
et al.
Journal articles
hal-00462654v1
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Atomistic Modelling and Simulation of Transmission Electron Microscopy Images: Application to Intrinsic Defects of Graphene
Cyril Guedj
,
Léonard Jaillet
,
François Rousse
,
Stephane Redon
SIMULTECH 2018 - 8th International Conference on Simulation and Modeling Methodologies, Technologies and Applications , Jul 2018, Porto, Portugal.
⟨10.5220/0006829200150024⟩
Conference papers
hal-01973626v1
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