Using hard-x-ray photoelectron spectroscopy to measure the oxidation state of gated Co/AlO$_x$ interfaces
Résumé
The perpendicular magnetic anisotropy (PMA) of metal/ferromagnet (FM)/oxide trilayers is known
to depend on the degree of oxidation of the FM/oxide interface. Among the different methods to tune
the PMA, magnetoionics is emerging as a promising technique with potential applications in low-power
spintronic devices. In this work, the PMA of Pt/Co/AlOx/HfO2 capacitorlike devices was gradually tuned
by electric field gating. Hard-x-ray photoelectron spectroscopy (HAXPES) measurements at a synchrotron
radiation source, guaranteeing tunable photon energies, a collimated beam, and a large photon flux, have
allowed us to probe the composition of the cobalt ultrathin film buried below the dielectric layer of the
capacitors, and its evolution upon the application of the gate voltage. The Co 2p HAXPES spectra of the
gated devices were compared to those obtained for Pt/Co/AlOx reference samples, for which the PMA
was controlled by tuning the Co oxidation with oxygen plasma. For similar magnetic anisotropy states,
the two types of samples exhibit equivalent Co 2p HAXPES spectra, with the same weight of metallic Co
and CoO signatures. These results constitute direct experimental proof that, in our integrated devices, the
gate voltage modifies the PMA through the modification of the oxidation state of the buried cobalt layer
driven by oxygen-ion migration.
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