%0 Journal Article %T Temperature driven structural evolution of Ge-rich GeSbTe alloys and role of N-doping %+ CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information %A Prazakova, L. %A Nolot, E. %A Martinez, E. %A Fillot, F. %A Rouchon, D. %A Rochat, N. %A Bernard, M. %A Sabbione, C. %A Morel, D. %A Bernier, N. %A Grenier, A. %A Papon, A.-M. %A Cyrille, M.-C. %A Navarro, Gabriele %< avec comité de lecture %@ 0021-8979 %J Journal of Applied Physics %I American Institute of Physics %V 128 %N 21 %P 215102 %8 2020-12-07 %D 2020 %R 10.1063/5.0027734 %Z Engineering Sciences [physics]Journal articles %X Ge-rich GeSbTe alloys allowed overcoming temperature limitations of Phase-Change Memory technology. In this paper, we present a thorough investigation of the structural evolution and crystallization process of these alloys as a function of increasing temperature of annealing. We highlight the progressive rearrangement of the structure towards the demixing of Ge and GeSbTe phases. In particular, we show the stability of Sb-Te units and the development of Ge-Te bonds around these features. We observe the formation of a transient GeSbTe phase, which is driven by crystallization phenomena, leading to a gradual diffusion and expulsion of Ge. Therefore, the system moves towards the complete separation of Ge and Ge2Sb2Te5 stable phases. Furthermore, we investigate the effect of N doping in Ge-rich GeSbTe, which induces the formation of Ge-N bonds. Such features are demonstrated to be responsible for a delayed structural reorganization to higher temperatures, thus affecting the entire process of crystallization and phase separation in the alloy. %G English %2 https://cea.hal.science/cea-03707285/document %2 https://cea.hal.science/cea-03707285/file/JAP2020_Prazakova_Navarro_submission_v2.pdf %L cea-03707285 %U https://cea.hal.science/cea-03707285 %~ CEA %~ OPENAIRE %~ ANR